For micro/nanoscale devices, surface functionalization is essential to achieve function and performance superior to those that originate from the inherent bulk material properties. As a method of surface functionalization, we dip-coated nanometer-thick liquid lubricant films onto solid surfaces and then patterned the lubricant films with ultraviolet (UV) irradiation through a photomask. Surface topography, adhesion, and friction measurements demonstrated that the patterned films feature a concave-convex thickness distribution with thicker lubricant in the irradiated regions and a functional distribution with lower adhesion and friction in the irradiated convex regions. The pattern linewidth ranged from 100 to as fine as 0.5 pm. The surface functionalization effect of UV-patterning was investigated by measuring the water contact angles, surface energies, friction forces, and depletion of the patterned, as-dipped, and full UVirradiated lubricant films. The full UV-irradiated lubricant film was hydrophobic with a water contact angle of 102.1, and had lower surface energy, friction, and depletion than the as-dipped film, which was hydrophilic with a water contact angle of 80.7. This demonstrates that UV irradiation substantially improves the surface and tribological properties of the nanometer-thick liquid lubricant films. The UV-patterned lubricant films exhibited superior surface and tribological properties than the as-dipped film. The water contact angle increased and the surface energy, friction, and depletion decreased as the pattern linewidth decreased. In particular, the 0.5-pm patterned lubricant film even showed a larger water contact angle and lower friction and depletion than the full UV-irradiated film. These indicate that UV-patterning of nanometer-thick lubricant films with a minimized linewidth has a better surface functionalization effect than full UV irradiation. Enhancement of the surface functionalization effect may be attributed to a transition in the contact state, which was indicated by the different instantaneous friction behavior of the 0.5-pm patterned lubricant film. (C) 2014 Elsevier B.V. All rights reserved.