Multilayered thin film heterostructures of alpha-Fe2O3/CdS/alpha-Fe2O3 were prepared through physical vapor deposition. Each alpha-Fe2O3 layer was deposited by e-beam evaporation of iron in an oxygen atmosphere. The CdS layer was deposited by thermal evaporation in a vacuum. The effect of post annealing of multilayered thin films in air in the temperature range 250 degrees C to 450 degrees C was investigated. Structural characterization indicated the growth of the alpha-Fe2O3 phase with a polycrystalline structure without any CdS crystalline phase. As-deposited multilayer heterostructures were amorphous and transformed into polycrystalline upon annealing. The surface modification of the films during annealing was revealed by scanning electron microscopy. Spectrophotometric measurements were used to determine the optical properties, including the transmittance, absorbance, and band gap. All the films had both direct as well as indirect band gaps. (C) 2014 Elsevier B.V. All rights reserved.