The nanocrystalline BaCe0.7Zr0.1Y0.2O2.9 (BCZY) thin films have been deposited on alumina substrate by simple and economic spray pyrolysis technique. The spray deposited films were annealed at different temperatures and were characterized by different physio-chemical techniques. The XRD studies revealed orthorhombic structured BCZY thin films with little shift in 2 theta compared to BCY. The crystallite size and grain size were observed to enhance with annealing temperature. The grain growth was completed by 1000 degrees C and compact structure was obtained at 1100 degrees C. Evolution of the surface microstructure and roughness of the BCY and BCZY thin films is done using AFM. Raman spectra of BCZY and BCY exhibits pronounced characteristic band at 359 and 353.25 cm(-1) respectively. The proton conductivity of BCZY thin film in moist atmosphere was 0.83 x 10(-3) S cm(-1) at 400 degrees C. (C) 2014 Elsevier B.V. All rights reserved.