화학공학소재연구정보센터
Applied Surface Science, Vol.328, 577-582, 2015
Effective implantation of light emitting centers by plasma immersion ion implantation and focused ion beam methods into nanosized diamond
Two different implantation techniques, plasma immersion ion implantation and focused ion beam, were used to introduce nitrogen ions into detonation nanodiamond crystals with the aim to create nitrogenvacancy related optically active centers of light emission in near UV region. Previously samples were subjected to a defect creation process by helium irradiation in both cases. Heat treatments at different temperatures (750 degrees C, 450 degrees C) were applied in order to initiate the formation of nitrogen-vacancy related complex centers and to decrease the sp(2) carbon content formed under different treatments. As a result, a relatively narrow and intensive emission band with fine structure at 2.98, 2.83 and 2.71 eV photon energies was observed in the light emission spectrum. It was assigned to the N3 complex defect center. The formation of this defect center can be expected by taking into account the relatively high dose of implanted nitrogen ions and the overlapped depth distribution of vacancies and nitrogen. The calculated depth profiles distribution for both implanted nitrogen and helium by SRIM simulation support this expectation. (C) 2014 Elsevier B.V. All rights reserved.