The durable non-wettability of functionalized aluminum oxide (Al2O3) thin films coated with two different self-assembled monolayers (SAMs), phosphonic acid (HDF-PA) and trichlorosilane (HDF-S), was investigated by a water flow test method. After exposing the surface to 5 L of water droplets, the contact angle of HDF-S coated Al2O3 thin films remained at the initial value of similar to 102.7 degrees, while the contact angle of HDF-PA coated Al2O3 thin films decreased from an initial value of similar to 99.9 degrees to a value of similar to 69.3 degrees. Thermal annealing effect at various temperature post formation of the self-assembled HDF-PA on the Al2O3 were investigated and shown to enhance the durability of SAMs with a constant contact angle (similar to 100 degrees) annealed at 100-150 degrees C. (C) 2015 Elsevier B.V. All rights reserved.