The Marangoni effect on the mass transfer coefficient of falling films was investigated on inclined stainless-steel plates to elucidate the influence on the mass transfer performance of structured packing surfaces. Desorption of ethanol from water generated the Marangoni effect in the liquid phase while the process of oxygen desorption from water was proceeded. The enhanced liquid phase mass transfer by the Marangoni effect was found to be related to the ethanol concentration in the liquid, inclination of the plate, and liquid flow condition. A generalized correlation was proposed to predict the effective enhancement factor of the system incorporated with the Marangoni effect.