This paper describes a simple method to create carbon anode films for potential applications to the research field of lithium batteries. Carbon films were prepared using DC magneton sputtering with post-annealing process in the range from room temperature (RT) to 700 degrees C. Half cells assembled with lithium foils as the counter electrode and 1 M LiPF6 in EC:DMC (1:1 v/v) electrolytic solution was used to evaluate the discharging capacity of prepared anode thin films. We showed that carbon film deposited at RT can be more suitable for an anode material than that of higher temperature annealed films above 400 degrees C. A variety of analysis methods including X-ray diffraction spectrometry (XRD), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy were utilized to evaluate the defect density of the films; for example, the more defects on the film were identified when the carbon film was treated at a low temperature such as RT. It is envisioned that DC magnetron-sputtering with optimized process conditions can be useful for fabricating carbon based film anodes. (C) 2014 Elsevier B.V. All rights reserved.