ZnO nanowires were prepared by electrochemical deposition in polycarbonate ion track templates. After the deposition process the polymer templates were dissolved in dichloromethane and the nanowires were harvested by ultrasonication in isopropyl. A droplet of nanowire suspension was placed on a Si/SiO2 substrate patterned with interdigitated electrodes. By means of electron beam lithography single nanowires were selected and provided with electrical contacts. We found that in order to obtain reliable electrical contacts and typical field effect characteristics the electrode deposition process needs to be adapted to the 3 D shape of the wires and that annealing and passivation treatments are necessary. (C) 2014 Elsevier Ltd. All rights reserved.