Molybdenum sulfide is deposited by atomic layer deposition (ALD) using molybdenum hexacarbonyl and hydrogen sulfide. Film growth is studied using in-situ quartz crystal microbalance, ex-situ X-ray reflectivity and ellipsometry. Deposition chemistry is further investigated with in-situ Fourier transform infrared spectroscopy. Self-limiting nature of the reaction is observed, typical of ALD. Saturated growth rate of 2.5 angstrom per cycle at 170 degrees C is obtained. As-deposited films are found amorphous in nature. As-grown films are tested as lithium-ion battery anode under half cell configuration. Electrochemical chargedischarge measurements demonstrate a stable cyclic performance with good capacity retention. Discharge capacity of 851 mAh g (1) is obtained after 50 cycles which corresponds to 77% of capacity retention of the initial capacity. (C) 2014 Elsevier Ltd. All rights reserved.