Nano-thin platinum (Pt) films with a dense microstructure for low-temperature solid oxide fuel cells (LT-SOFCs) were fabricated by atomic layer deposition (ALD) and were characterized in terms of their micro-structural properties and electrochemical performance. Pt thin films with a purity level of similar to 99% were achieved by controlling the O-2 pulsing time. The agglomeration behavior of the ALD Pt thin films was characterized by the annealing temperature, becoming extremely severe above 550 degrees C. An LT-SOFC with a 25 nm thick dense ALD Pt cathode layer exhibited a peak power density of similar to 110 mW/cm(2) at 450 degrees C. Copyright (C) 2014, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.