화학공학소재연구정보센터
Journal of Crystal Growth, Vol.403, 32-37, 2014
HVPE-GaN growth on misoriented ammonothermal GaN seeds
The results of the Hydride Vapor Phase Epitaxy (HVPE) on ammonothermal GaN seeds (Am-GaN) with various misorientations: 0.3, 0.5 and 1 degree to the [10 - 10] and [11 - 20] directions are presented. Growth rate and structural quality of the HVPE-GaN layers are analyzed. Morphology of the crystal growing surface at the beginning of the crystallization process (after one and two hours of growth) and at the end of it (after eight hours) is presented as a function of the Am-GaN seed misorientation. Based on these results a rough growth model is proposed and discussed in detail. (C) 2014 Elsevier B.V. All rights reserved.