Oxides nanoparticles-based process is one of the successful approaches to CuIn1-xGaxSe2 (CIGS) formation. To explore systematically the possibility of application of the similar methods to high quality Cu2ZnSnS4 (CZTS), an oxides nanoparticles-based process for preparation of CZTS films is described. The CZTS films are prepared by sulfurizing oxides precursor. Thermodynamic appreciation of sulfurization of oxides precursor is first studied. The development of the CZTS formation with increasing temperature is also investigated. Through optimizing the sulfurization, phase-pure CZTS films with very large grains are obtained. The loss of tin can be avoided, due to the stability of oxides. Finally, preliminary CZTS thin-film solar cells with efficiencies of 1.47% have been fabricated. This study provides basis for low-cost and large area CZTS solar cells. (C) 2014 Elsevier B.V. All rights reserved.