Four gold complexes were tested as a precursor for focused-electron-beam-induced deposition: [(ClAuMe2)-Me-III](2), ClAuI(SMe2), ClAuI(PMe3), and MeAuI(PMe3). Complexes [(ClAuMe2)-Me-III](2) and MeAuI(PMe3) are volatile, have sufficient vapor pressure at room temperature for deposition experiments, and were found to yield deposits that contain gold (29-41 and 19-25 atom %, respectively). Electrons easily remove the Cl ligand from [(ClAuMe2)-Me-III](2), and predominantly both methyl ligands are incorporated into the deposit. Electrons remove at least one methyl group from MeAuI(PMe3). Complexes ClAuI(SMe2) and ClAuI(PMe3) are not suitable as a precursor. They dissociate in vacuum, and the only volatile components are Cl, SMe2, and PMe3, respectively.