The demand for flexible transparent conducting oxides (TCOs) for optoelectronic applications, such as touch panels, flat panel displays, organic light-emitting diodes (OLEDs) and other mobile devices, has been increasing continuously. To produce flexible TCOs electrodes, amorphous ZnO-doped ITO (ZITO) films were deposited on flexible transparent cellulose, PES and glass substrates by RF sputtering using a single target (In2O3 50.7/ZnO 44.4/SnO2 4.9 mol%). With increasing oxygen ratio during ZITO film deposition, the sheet resistance increased linearly, whereas the carrier density decreased, which may be due to the rough surface of cellulose caused by the regeneration film process. The overall electrical performance of ZITO was found to be comparable to that of the other transparent substrates. (C) 2014 Elsevier Ltd. All rights reserved.