화학공학소재연구정보센터
Thin Solid Films, Vol.571, 399-404, 2014
In and out of incidence plane Mueller matrix scattering ellipsometry of rough mc-Si
partial in and out of incidence plane Mueller matrix scattering ellipsometry (MMSE) experiment is presented, where the Stokes vectors of the scattered light are detected in slightly more than a quarter hemisphere. The MMSE system is briefly reviewed. The Mueller scattering matrix obtained in reflection from as-cut rough solar grade mc-Si surfaces is reported. For the as-cut surface with an estimated correlation length of 4 mu m and root mean square roughness of 550 nm, using an illumination wavelength of 532nm, the degree of polarization is observed to be larger than 0.86, even far away from the incidence plane. (C) 2014 Elsevier B.V. All rights reserved.