FeSxOy thin films were fabricated by the electrochemical deposition method on indium-tin-oxide (ITO)-coated glass substrates. FeSxOy is an environment-friendly material and is expected to have properties suitable for photovoltaics. The deposition solution contained FeSO4 and Na2S2O3. At 40 degrees C, a compact black film 0.5 mu m in thickness with Fe: S:O composition 1:1:1 was deposited in 5 min on ITO substrate from a solution containing 40mMFeSO(4) and 100 mM Na2S2O3 at a pH5.6 (inherent). In the photoelectrochemical measurement, the deposited FeSxOy film showed p-type conduction and photoconductivity. A ZnO/FeSxOy heterostructure was fabricated, and rectification properties were confirmed. (C) 2014 Elsevier B.V. All rights reserved.