화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Korean Journal of Materials Research, Vol.11, No.8, 671-678, August, 2001
Export Citation
RuO 2 박막의 미세 구조가 박막형 마이크로 슈퍼캐패시터의 특성에 미치는 영향
Effect of RuO 2 Thin Film Microstructure on Characteristics of Thin Film Micro-supercapacitor
김한기1, 2, 성태연2, 임재홍1, 조원일3, 신영화4, 윤영수1
  • 1한국과학기술연구원 박막기술연구센터
  • 2광주과학기술원 신소재공학과
  • 3연료전지 센터
  • 4경원대학교 전자공학과
Han-Ki Kim1, 2, Tae-Yeon Seong3, Jae Hong Lim1, Won Il Cho4, Young Hwa Shin5, and Young Soo Yoon1
  • 1Thin Film Technology Research Center, & fuel Cell Tesearch Center, Korea
  • 2Department of Materials Science and Engineering, Kwangju Institutue of Science and Technology(K-JIST), Kwangju 500-712
  • 3Department of Materials Science and Engineering, Kwangju Institutue of Science and Technology(K-JIST), Kwangju 500-712, Korea
  • 4Korea Institute of Science and Technology (KIST), P.O. Box 131 Chengryang, Seoul 130-650, Korea
  • 5Department of Electronic Engineering, Kyungwon University, 65 Pokjung-dong, Sujungku Sangnam-Si, Korea
초록
RuO 2 박막을 전극으로 하여 Pt/Ti/Si 기판 위에 RuO 2 /LiPON/ RuO 2 의 다층 구조로 이루어진 전고상의 박막형 마이크로 슈퍼캐패시터를 제작하였다. 전극용 RuO 2 박막은 반응성 dc 마그네트론 스퍼터를 이용하여 O 2 /[Ar+ O 2 ]비를 증가시키며 성장시켰고, 비정질 LiPON 고체전해질 박막은 순수한 질소분위기 하에서 rf 스퍼터링으로 성장시켰다. 상온에서의 충-방전 측정을 통해 RuO 2 박막의 미세구조에 따라 슈퍼캐패시터의 사이클 특성이 영향을 받는 것을 알 수 있었다. Glancing angle x-ray diffraction(GXRD)과 transmission electron microscopy (TEM) 분석을 통해 산소 유량의 증가가 RuO 2 박막의 미세 구조의 영향을 주는 것을 알 수 있었고, X-ray photoelectron spectroscopy (XPS) 분석을 통해 산소 유량 비의 증가가 Ru과 산소간의 결합에도 영향을 줌을 알 수 있었다. 또한 사이클 후 슈퍼캐패시터의 TEM 및 AES depth profiling 분석을 통해, 충-방전 시 RuO 2 와 LiPON과의 계면반응에 의해 형성된 계면 층이 사이클 특성에 영향을 줌을 알 수 있었다.
All solid-state thin film micro supercapacitor, which consists of RuO 2 /LiPON/ RuO 2 multi layer structure, was fabricated on Pt/Ti/Si substrate using a RuO 2 electrode. Bottom RuO 2 electrode was grown by dc reactive sputtering system with increasing O 2 /[Ar+O 2 ] ratio at room temperature, and a LiPON electrolyte film was subsequently deposited on the bottom RuO 2 electrode at pure nitrogen ambient by rf reactive sputtering system. Room temperature charge-discharge measurements based on a symmetric RuO 2 /LiPON/ RuO 2 structure clearly demonstrates the cyclibility dependence on the microstructure of the RuO 2 electrode. Using both glancing angle x-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the microstructure of the RuO 2 electrode was dependent on the oxygen flow ratio. In addition, x- ray photoelectron spectroscopy(XPS) examination shows that the Ru-O binding energy is affected by increasing oxygen flow ratio. Furthermore, TEM and AES depth profile analysis after cycling demonstrates that the interface layer formed by interfacial reaction between LiPON and RuO 2 act as a main factor in the degradation of the cyclibility of the thin film micro-supercapacitor.
Keywords:thin film supercapacitor;LiPON electrolyte;RuO 2 electrode;TEM;GXRD;cyclibility
  1. Bates JB, Cruzalski GR, Dudney NJ, Luck CF, Yu XH, Solid State Technology, 59 (1993)
  2. 조원일, 윤영수, 물리학과 첨단기술, 21 (2001)
  3. Conway BE, Electrochemical supercapacitor, Kluwer Academic/ Plenum Publisher, New-York, (1999) pp223 (1999)
  4. Kim HK, Soeng TY, Lim JH, Jeon EJ, Cho WI, Yoon YS, J. of Power Sources.(accepted)
  5. Zheng JP, Cygan PJ, Jow TR, J. Electrochem. Soc., 142(8), 2699 (1995)
  6. Yoon YS, Lim JH, Choi DJ, Choi WI, J. Power Source, (accepted for publication)
  7. Lim JH, Choi DJ, Son BH, Nam SC, Cho WI, Yoon YS, The 197th meeting of the Electrochemical Society, Toronto, Canada, abstract 44, (2000) (2000)
  8. Lim JH, Choi DJ, Kim HK, Cho WI, Yoon YS, J. Electrochem. Soc., 148, A278 (2001)
  9. Kim IH, Kim KB, Electrochem. Solid State Lett., 4(5), A62 (2001)
  10. Lim JH, Choi DJ, Son BH, Nam SC, Cho WI, Yoon YS, Proceeding of the 1st international microsystem sysmposium, 142 (2001)
  11. Lee JG, Kim YT, Kim SK, Choh SH, J. Appl. Phys., 77, 5473 (1995)
  12. Abe Y, Kaga Y, Kawamura M, Sasaki K, J. Vac. Sci. Technol. B, 18(3), 31348 (2000)
  13. Bates JB, Dudney NJ, Gruzalski GR, Zuhr RA, Choudhury A, Luck CF, Robertson JD, Solid State Ionics, 53-56, 647 (1992)
  14. Kim HK, Soeng TU, Jeon EJ, Ok YW, Cho WI, Yoon YS, J. Kor. Ceram. Soc., 38, 274 (2001)
  15. Kim HK, Seong TY, Jeon EJ, Cho WI, Yoon YS, J. Electrochem. Soc. (accepted)
  16. Jang JS, Chang IC, Kim HK, Lee S, Seong TY, Park SJ, Appl. Phys. Lett., 74, 70 (1999)
  17. Kim HK, Han SH, Seong TY, Choi WK, Appl. Phys. Lett., 77, 1647 (2000)
  18. Kim HK, Seong TY, Lim JH, Jeon EJ, Cho WI, Yoon YS, J. Vac. Sci. Technol.B (submitted)