광증폭기 응용을 위한 Er 첨가 실리카 유리 박막의 제조

김재선; 신동욱; 정선태; 송영휘; Jae Sun Kim; Dong Wook Shin; Sun Tae Jung; Young Hwi Song

Korean Journal of Materials Research, Vol.11, No.5, 385-392, May, 2001

Export Citation

광증폭기 응용을 위한 Er 첨가 실리카 유리 박막의 제조

The fabrication of Er-doped silica film for optical amplifier

김재선, 신동욱, 정선태¹, 송영휘¹

한양대학교 세라믹공학과
¹삼성전자 광소재 사업팀

Jae Sun Kim, Dong Wook Shin, Sun Tae Jung¹, and Young Hwi Song¹

Dept. of Ceramic Engineering, Hanyang University, Korea
¹Samsung Electronics, Korea

초록

집적형 광증폭기는 대량생산이 용이하고. 단일 칩에 다기능의 광소자를 집적할 수 있다는 장점 때문에 활히 연구되어져 왔다. 본 연구에서는 수동형 집적광소자의 제작에 사용되는 화염가수분해증착법 (FHD)을 이용하여 실리콘 (Si) /실리카 ( SiO 2 ) 광도파막을 제작하고, 이 박막에 Solution Doping 법을 이용하여 Er 3+ 를 첨가하여 광증폭 매질을 제작하는 연구를 수행하였다.

There have been many investigations and researches on PLC type of optical amplifiers because they are convenient for mass production and also can integrate multi-functional devices into a single chip. In this research. the fabrication of optical waveguide made of Si/ Sio 2 by FHD(Flame Hydrolysis Deposition) for passive integrated optical devices and 1.5μm optical amplifier by Solution Doping method, which is one of the method doping Er 3+ into the thin film, are mainly discussed.

Keywords:FHD;Waveguide;Optical Amplifier;Solution Doping

[References]

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Polman A, J. Appl. Phy., 82(1), 1 (1997)
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[1] Hibino Y, Kitagawa T, Shimuzu M, Hanawa F, Sugita A, IEEE photonics Tech. Lett., 1(11), 349 (1989)

[2] Kitagawa T, Hattori K, Shuto K, Yasu M, Kobayashi M, Horiguchi M, Elec. Lett., 28(19), 1818 (1992)

[3] Shuto K, Hattori K, Kitagawa T, Ohmori Y, Horiguchi M, Elec. Lett., 29(22), 139 (1993)

[4] Kitagawa T, Hattori K, Shuto K, Oguma M, Temmyo J, Suzuki S, Horiguchi M, Proc. ECOC ' 93, Montreaux, 12-16, 41 (1993)

[5] Shmulovich J, Wong A, Wong YH, Becker PC, Bruce AJ, Adar R, Elec. Lett., 28(13), 1181 (1992)

[6] Hattori K, Kitagawa T, Oguma M, Ohmori Y, Horiguchi M, Conf. of Optical Fiber Comm., OFC' 94 Technical Digest, 280 (1994) (1994)

[7] Sanford NA, Malone KJ, Larson DR, Hickernell RK, Opt. Lett., 16(15), 1168 (1991)

[8] Shmulovich J, Wong A, Wong YH, Becker PC, Bruce AJ, Adar R, Elec. Lett., 28(13), 1181 (1992)

[9] Polman A, J. Appl. Phy., 82(1), 1 (1997)

[10] Kitagawa T, Hattori K, Shimizu M, Ohomori Y, Kobayashi M, Elec. Lett., 27(4), 334 (1991)

[11] Tumminelli R, Hakimi F, Haavisto J, Opt. Lett., 16(14), 1098 (1991)

[12] Townsend JE, Poole SB, Payne DN, Elec. Lett., 23(7), 329 (1987)

[13] Sudo S, Edahiro T, Kawachi M, Transactions of the TECE Japan, E62, 731 (1980)

[14] Scherer GW, Garino T, J. Am. Cer. Soc., 68(4), 216 (1985)

[15] Barbarossa G, Ph. D, Planar silica optical device technology, Thesis, Giovanni Barbarossa, MCMXCII (1992) (1992)

[16] Shelby JE, Rare Elements in glasses, Trans Tech Publications Ltd, Switzerland (1994) (1994)

[17] 문종하, 정형곤, 이정우, 박강희, 박현수, 김병훈, J. Kor. Cer. Soc., 37(2), 177 (2000)

[18] Sudo S, Optical Fiber Amplifiers: Materials, Devices, and Applications, Artech House, Inc., Norwood, MA (1997) (1997)