Korean Journal of Materials Research, Vol.9, No.8, 831-836, August, 1999
(Fe 1?x Co x ) 89 Zr 11 비정질 자성박막의 자기특성(II)
Magnetic Properties of (Fe 1?x Co x ) 89 Zr 11 Amorphous Films(II)
초록
RF 스퍼터링법으로 제작한 비정질 (Fe(sub)1-xCo(sub)x)(sub)89Zr11 자성박막의 자기특성을 Co농도에 따라 조사하였다. 130 Oe의 인가자기장중 190~20 0 ? C 에서 10분간 2단 열처리를 행하였을때, 시편중 x=0.4의 박막은 높은 자왜를 나타냄에도 불구하고 0.25 Oe의 낮은 보자력 H(sub)c과, 8.7 MHz, 10 mOe의 여기자기장에서 측정된 미분투자율 μ (sub)d는 280 정도로 가장 양호한 값을 나타내었다. 이와 같은 거동은 박막내 최적의 압축응력상태에서 야기된 자기이방성의 변화에 기인한다.
Magnetic properties of (Fe(sub)1-xCo(sub)x)(sub)89Zr11 amorphous films fabricated by RF sputtering method have been investigated as a function of Co content x. By means of two step field annealing at 190~20 0 ? C for 10 minutes in the magnetic field of 130 Oe, the film with x=0.4 among the samples shows the superior soft magnetic properties in spite of showing the high magnetostriction. For example, the obtained properties of coercivity and differential permeability measured in an exciting field of 10 mOe at the frequency of 8.7 MHz are 0.25 Oe and 280, respectively. It is confirmed that such behavior is due to the variation of magnetic anisotropies caused by a optimal compressive stress within the film.
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