실리콘 표면에 증착된 다공성 알루미나의 수분 흡착 거동

임효령; 엄누시아; 조정호; 좌용호; Hyo Ryoung Lim; Nu Si A Eom; Jeong-Ho Cho; Yong-Ho Choa

Korean Chemical Engineering Research, Vol.53, No.3, 401-406, June, 2015

DOI10.9713/kcer.2015.53.3.401 Export Citation

실리콘 표면에 증착된 다공성 알루미나의 수분 흡착 거동

Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer

임효령, 엄누시아, 조정호 ¹, 좌용호 ^†

한양대학교 화학공학과, 426-791 경기도 안산시 상록구 사3동 1271
¹한국세라믹기술원 전자소재융합본부, 153-801 서울특별시 금천구 가산동 233-5

Hyo Ryoung Lim, Nu Si A Eom, Jeong-Ho Cho¹, and Yong-Ho Choa^†

Department of Fusion Chemical Engineering, Hanyang University, 1271 Sa 3-dong, Sangrok-gu, Ansan Gyeonggi 426-791, Korea
¹Electronic Components Center, Korea Institute of Ceramic Engineering & Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea

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초록

게터는 반도체와 초소형 전자패키지 소자 내부의 수소와 수증기 같은 기체를 흡착하여 기기 작동 시 방해 기체를 제거하는 기능을 한다. 본 연구에서는 재료와 공정 측면에서 높은 가격 경쟁력을 갖는 게터로, 실리콘 기판에 올라간 다공성 알루미나 구조체를 제조하는 연구를 진행하였다. 기공의 크기가 조절된 양극산화 알루미나(AAO)는 높은 비표면적을 가지며 표면에 OH-기를 다수 포함하므로 높은 효율을 갖는 수분 흡착제로 사용되었다. 등온 수분 흡탈착 곡선으로 분석한 수분 흡착도는 상대습도 35%일 때 2.02%로 우수한 성능을 나타내었다. 즉, 저온에서 사용가능하며, 추가 열원이 필요하지 않아 박막구조의 소형화가 용이하여 내부 손상 및 오염을 방지할 수 있는 게터재를 합성하였다.

Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the highsurface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH=35%), obtained by analyzing isothermal adsorption/desorption curve.

Keywords:Getter;Moisture Adsorption;Solution Process;Anodizing;Anodic Aluminum Oxide

[References]

Lorenz HP, Vaccum Technology, In Ullmann’s Encyclopedia of Industrial Chemistry, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim(2000).
Previti M, Gilleo K, “Getters: Micromolecular Scavengers for Packaging,” Proceedings of International Symposium on Advanced Packaging Materials: Processes, Properties and Interfaces, March, Georgia(2001).
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Chuntonov KA, Yatsenko SP, Recent Patents on Materials Science, 6(1), 29 (2013)
Lee W, Park SJ, Chem. Rev., 114(15), 7487 (2014)
Ono S, Ichinose H, Masuko N, Corrosion Sci., 33(6), 841 (1992)
Yao L, Zheng M, Li H, Ma L, Shen W, Nanotechnology, 20(39), 395501 (2009)
Hideki M, Masahiro S, Jpn. J. Appl. Phys., 35(1B), L126 (1999)
Hwang SK, Jeong SH, Hwang HY, Lee OJ, Lee KH, Korean J. Chem. Eng., 19(3), 467 (2002)
Sanz O, Echave FJ, Odriozola JA, Montes M, Ind. Eng. Chem. Res., 50(4), 2117 (2011)
Crouse D, Lo YH, Miller A, Crouse M, Appl. Phys. Lett., 76(1), 49 (2000)
Rabin O, Herz PR, Lin YM, Akinwande AI, Cronin SB, Dresselhaus MS, Adv. Funct. Mater., 13(8), 631 (2003)
Yang Y, Chen H, Mei Y, Chen J, Wu X, Bao X, Solid State Commun., 123(6), 279 (2002)
Myung NV, Lim J, Fleurial JP, Yun M, West W, Choi D, Nanotechnology, 15(7), 833 (2004)
Henry MS, James RS, “Hydrogen and Moisture Getter and Absorber for Sealed Devices,” U.S. Patent No. 5,888,925(1999).

[Related Articles]

[1] Lorenz HP, Vaccum Technology, In Ullmann’s Encyclopedia of Industrial Chemistry, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim(2000).

[2] Previti M, Gilleo K, “Getters: Micromolecular Scavengers for Packaging,” Proceedings of International Symposium on Advanced Packaging Materials: Processes, Properties and Interfaces, March, Georgia(2001).

[3] Niklaus F, Vieider C, Jakobsen H, “MEMS-based Uncooled Infrared Bolometer Arrays: A Review,” Proceedings of MEMS/MOEMS Technologies and Applications III, November, Beijing (2007). (2007)

[4] http://www.onboard-technology.com/pdf_febbraio2005/020509.pdf.

[5] Ramesham R, Kullberg RC, J. Micro-Nanolithogr. MEMS MOEMS, 8(3), 031307 (2009)

[6] Chuntonov KA, Yatsenko SP, Recent Patents on Materials Science, 6(1), 29 (2013)

[7] Lee W, Park SJ, Chem. Rev., 114(15), 7487 (2014)

[8] Ono S, Ichinose H, Masuko N, Corrosion Sci., 33(6), 841 (1992)

[9] Yao L, Zheng M, Li H, Ma L, Shen W, Nanotechnology, 20(39), 395501 (2009)

[10] Hideki M, Masahiro S, Jpn. J. Appl. Phys., 35(1B), L126 (1999)

[11] Hwang SK, Jeong SH, Hwang HY, Lee OJ, Lee KH, Korean J. Chem. Eng., 19(3), 467 (2002)

[12] Sanz O, Echave FJ, Odriozola JA, Montes M, Ind. Eng. Chem. Res., 50(4), 2117 (2011)

[13] Crouse D, Lo YH, Miller A, Crouse M, Appl. Phys. Lett., 76(1), 49 (2000)

[14] Rabin O, Herz PR, Lin YM, Akinwande AI, Cronin SB, Dresselhaus MS, Adv. Funct. Mater., 13(8), 631 (2003)

[15] Yang Y, Chen H, Mei Y, Chen J, Wu X, Bao X, Solid State Commun., 123(6), 279 (2002)

[16] Myung NV, Lim J, Fleurial JP, Yun M, West W, Choi D, Nanotechnology, 15(7), 833 (2004)

[17] Henry MS, James RS, “Hydrogen and Moisture Getter and Absorber for Sealed Devices,” U.S. Patent No. 5,888,925(1999).