Zinc Oxide Wire-Like Thin Films as Nitrogen Monoxide Gas Sensor

Nguyen Le Hung; Hyojin Kim; Dojin Kim

Korean Journal of Materials Research, Vol.25, No.7, 358-363, July, 2015

DOI10.3740/MRSK.2015.25.7.358 Export Citation

Zinc Oxide Wire-Like Thin Films as Nitrogen Monoxide Gas Sensor

Nguyen Le Hung^{1, 2}, Hyojin Kim^{1, 3, †}, and Dojin Kim^{1, 3}

¹Department of Materials Science and Engineering, Chungnam National University, Daeduk Science Town, Daejeon 305-764, Korea
²Department of Physics, Thai Nguyen University of Education, Thai Nguyen, Vietnam
³, Korea

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We present an excellent detection for nitrogen monoxide (NO) gas using polycrystalline ZnO wire-like films synthesized via a simple method combined with sputtering of Zn metallic films and subsequent thermal oxidation of the sputtered Zn nanowire films in dry air. Structural and morphological characterization revealed that it would be possible to synthesize polycrystalline hexagonal wurtzite ZnO films of a wire-like nanostructure with widths of 100-150 nm and lengths of several microns by controlling the sputtering conditions. It was found from the gas sensing measurements that the ZnO wirelike thin film gas sensor showed a significantly high response, with a maximum value of 29.2 for 2 ppm NO at 200 oC, as well as a reversible fast response to NO with a very low detection limit of 50 ppb. In addition, the ZnO wire-like thin film gas sensor also displayed an NO-selective sensing response for NO, O2, H2, NH3, and CO gases. Our results illustrate that polycrystalline ZnO wire-like thin films are potential sensing materials for the fabrication of NO-sensitive high-performance gas sensors.

Keywords:oxide semiconductor;zinc oxide;nanostructure;gas sensor

[References]

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Navale SC, Ravi V, Mulla IS, Gosavi SW, Kulkarni SK, Sens. Actuators B-Chem., 126, 382 (2007)
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Koshizaki N, Oyama T, Sens. Actuators B-Chem., 66, 119 (2000)
Ahn E, Jung H, Hung NL, Oh D, Kim H, Kim D, Korean J. Mater. Res., 19(11), 631 (2009)
Huang XJ, Choi YK, Sens. Actuators B-Chem., 122, 659 (2007)
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Wang YG, Lau SP, Lee HW, Yu SF, Tay BK, Zhang XH, Hng HH, J. Appl. Phys., 94, 354 (2003)
Le Hung N, Ahn E, Park S, Jung H, Kim H, Hong SK, Kim D, Hwang C, J. Vac. Sci. Technol. A, 27(6), 1347 (2009)
Scott RWJ, Yang SM, Chabanis G, Coombs N, Williams DE, Ozin GA, Adv. Mater., 13(19), 1468 (2001)
Takata M, Tsubone D, Yanagida H, J. Am. Ceram. Soc., 59, 4 (1976)
Xue XY, Feng P, Wang YG, Wang TH, Appl. Phys. Lett., 91, 022111 (2007)
Zach MP, Ng KH, Penner RM, Science, 290, 2120 (2000)

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[2] Navale SC, Ravi V, Mulla IS, Gosavi SW, Kulkarni SK, Sens. Actuators B-Chem., 126, 382 (2007)

[3] Zhang SL, Park SM, Lim JO, Huh JS, Met. Mater. Int., 14, 621 (2008)

[4] Koplin TJ, Siemons M, Ocen-Valentin C, Sanders D, Simon U, Sensors, 6, 298 (2006)

[5] Koshizaki N, Oyama T, Sens. Actuators B-Chem., 66, 119 (2000)

[6] Ahn E, Jung H, Hung NL, Oh D, Kim H, Kim D, Korean J. Mater. Res., 19(11), 631 (2009)

[7] Huang XJ, Choi YK, Sens. Actuators B-Chem., 122, 659 (2007)

[8] Lin CY, Fang YY, Lin CW, Tunney JJ, Ho KC, Sens. Actuators B-Chem., 146, 28 (2010)

[9] Wang YG, Lau SP, Lee HW, Yu SF, Tay BK, Zhang XH, Hng HH, J. Appl. Phys., 94, 354 (2003)

[10] Le Hung N, Ahn E, Park S, Jung H, Kim H, Hong SK, Kim D, Hwang C, J. Vac. Sci. Technol. A, 27(6), 1347 (2009)

[11] Scott RWJ, Yang SM, Chabanis G, Coombs N, Williams DE, Ozin GA, Adv. Mater., 13(19), 1468 (2001)

[12] Takata M, Tsubone D, Yanagida H, J. Am. Ceram. Soc., 59, 4 (1976)

[13] Xue XY, Feng P, Wang YG, Wang TH, Appl. Phys. Lett., 91, 022111 (2007)

[14] Zach MP, Ng KH, Penner RM, Science, 290, 2120 (2000)