Polydimethylsiloxane (PDMS) film was treated with RF low-pressure plasmas (LPPs) made of mixtures of oxygen and argon for increasing surface polarity, minimizing hydrophobic recovery (i.e. retard ageing) and increasing adhesion to acrylic adhesive tape for medical use. Statistical design of experiments has been used for determining the most influencing experimental parameters of the LPP treatment of PDMS. Water contact angle values (measured 24 h after treatment) and the O/C ratio obtained from XPS experiments were used as response variables. Working pressure was the most influencing parameter in LPP treatment of PDMS, and the duration of the treatment, the power and the oxygen-argon mixture composition determined noticeably its effectiveness. The optimal surface properties in PDMS and inhibited hydrophobic recovery were achieved by treatment with 93 vol% oxygen + 7 vol% argon LLP at low working pressure (300 mTorr), low power (25 W) and long duration of treatment (120 s). (C) 2015 Elsevier B.V. All rights reserved.