This paper presents a method for the fabrication of periodic variable-sized platinum nanoparticles (PtNPs) on the surface of silicon via laser interference patterning (LIP). In the work, a thin Pt film of 50 nm thick was previously deposited on the surface of polished silicon by ion sputtering deposition, and it was patterned using two-beam laser interference irradiation. Periodic variable-sized PtNPs were then self-assembled on the local silicon area as the result of the interference irradiation. Significant variation in size can only be obtained in a reasonable laser intensity and interference contrast range. The sizes and size variation of the PtNPs were strongly depended upon laser intensity. The experimental results show that periodic variable-sized PtNPs can be fabricated in a controllable way via LIP. (C) 2015 Elsevier B.V. All rights reserved.