We introduce a simple method to synthesize localized surface plasmon resonance (LSPR) sensor chip of Ag NPs on the hydrogenated amorphous carbon by co-deposition of RF-Sputtering and RF-PECVD. The X-ray photoelectron spectroscopy revealed the content of Ag and C atoms. X-ray diffraction profile and atomic force microscopy indicate that the Ag NPs have fcc crystal structure and spherical shape and by increasing deposition time, particle sizes do not vary and only Ag NPs aggregation occurs, resulting in LSPR wavelength shift. Firstly, by increasing Ag NPs content, in-plan interparticles coupling is dominant and causes redshift in LSPR. At the early stage of agglomeration, out-plane coupling occurs and in-plane coupling is reduced, resulting a blueshift in the LSPR. By further increasing of Ag NPs content, agglomeration is completed on the substrate and in-plan coupling rises, resulting significant redshift in the LSPR. Results were used to implement biosensor application of chips. Detection of DNA primer at fM concentration was achieved based on breaking interparticles coupling of Ag NPs. A significant wavelength shift sensitivity of 30 nm and a short response time of 30 min were obtained, where both of these are prerequisite for biosensor applications. (C) 2015 Elsevier B.V. All rights reserved.