화학공학소재연구정보센터
Applied Surface Science, Vol.360, 547-552, 2016
Surface reconstruction: An effective method for the growth of mismatched materials
The crystalline quality of epitaxial films depends on the degree of lattice match between substrates and films. Here, we report a growth strategy for large mismatched epi-films to grow GaSb films on Si(1 1 1) substrates. The epitaxial strategy can be influenced by controlling the surface reconstructions of Sbtreated Si(1 1 1). The film with the best quality was grown on Si(1 1 1)-(5 root 3 x 5 root 3)-Sb surface due to the stress release and the formation of a self-assembled 2D fishbone structure. Controlled surface engineering provides an effective pathway towards the growth of the large mismatched materials. (C) 2015 Elsevier B.V. All rights reserved.