A multilayered metallic structure, consisting of Cu foil and subsequently deposited Ag thin film covered with a passivation layer, was proposed to fabricate Ag micro/nanoparticles by stress migration. With employing a ductile Pt or brittle TiN thin film as passivation, Ag micro/nanoparticles were successfully fabricated by annealing the corresponding multilayered structure. The relationship between characteristics (average diameter, number and volume) of the formed Ag micro/nanoparticles and the annealing temperature was discussed. On this basis, the growth mechanism was developed, which indicates that the dimension of Ag particles was mainly dominated by the different pathways for the migration of diffused Ag atoms in the passivation layers of Pt and TiN and the annealing temperature. (C) 2015 Elsevier B.V. All rights reserved.