KDP is a common type of optics that is extremely difficult to polish by the conventional route. MRF is a local polishing technology based on material removal via shearing with minimal normal load and sub-surface damage. In contrast to traditional emendation on an abrasive, the MPEG soft coating is designed and prepared to modify the CIP surface to achieve a hardness matched with that of KDP because CIP inevitably takes part in the material removal during finishing. Morphology and infrared spectra are explored to prove the existence of homogeneous coating, and the improvement of MPEG for the polishing quality is validated by the analysis of roughness, turning grooves, and stress. The synthesized MPEG-coated CIP (MPEG-CIP) is chemically and physically compatible with KDP, which can be removed after cleaning. Our research exhibits the promising prospects of MPEG-CIP in KDP MRF. (C) 2015 Elsevier B.V. All rights reserved.