This study fabricated a plasmonic silicon solar cell covered with silver (Ag) nanoparticles (NPs) using an ultra-thin anodic aluminum oxide (AAO) template as a deposition mask. An ultra-thin AAO template of approximately 200 nm was produced using a single-step anodization process in which an Al substrate was etched with phosphoric acid (H3PO4) for 3 min. We then used scanning electron microscopy (SEM) to examine the thickness and density of the AAO as a function of anodization duration, the results of which were confirmed by optical transmission measurement. The photovoltaic performance of the resulting silicon solar cell with Ag NPs was characterized according to photovoltaic current-voltage and external quantum efficiency. The inclusion of Ag NPs resulted in a 32.92% increase in conversion efficiency, compared with reference solar cells produced without Ag NPs. (C) 2015 Elsevier B.V. All rights reserved.