Un-doped and Cu-doped ZnO nanowires were grown on glass substrates by hydrothermal method. To investigate the effect of pH values on dopant concentration and distribution in the as-grown ZnO nanowires, we carried out hydrothermal process in conjunction with controlling pH values ranging from 5.5 to 7.0. The results show that the disorder and chemical impurity induced lattice distortion are clearly affected by pH values. In Cu 2p3/2 core level, Cu element has a mixed valence state (Cu+, Cu2+). Cu2+ state rather than Cu+ was greatly affected by pH value of solution, resulting in controlled dopant concentration. As such, the dopant concentration is highest at 5.5 of pH, which was confirmed by X-ray diffractometry and micro-Raman spectroscopy. In addition, energy dispersive X-ray spectroscopic elemental mapping indicates the uniform distribution of Cu in ZnO nanowires. (C) 2015 Elsevier B.V. All rights reserved.