PbTiO3 thin films were prepared on various substrates by spraying an ultrasonically atomized aqueous solution of Pb(NO3)(2) + TiO(NO3)(2) into an inductively coupled plasma (ICP) under atmospheric pressure. Single-phase PbTiO3 with perovskite structure was obtained at 500-650 degrees C. The perovskite obtained below 600 degrees C showed less tetragonality due to the effect of grain size. The PbTiO3 films crystallized with preferred (1 1 1) and (0 0 1) orientations on sapphire (0 0 1) and MgO (1 0 0), respectively. Based on the analysis of ICP emission spectra, it is suggested that a reoxidation of titanium preceded that of lead in the plasma, and also that OH in the plasma played an important role in the deposition of PbTiO3.