화학공학소재연구정보센터
Journal of Materials Science, Vol.29, No.24, 6575-6580, 1994
The Effects of Deposition Variables on the Spray-Pyrolysis of ZnO Thin-Film
ZnO thin films were deposited by the spray pyrosol process, and some of their electrical and optical properties have been studied. The as-deposited films are highly resistive, whereas vacuum heat-treated films are good transparent conductors. Optical transmission was found to be more than 96% in between the near infrared and visible region. The ageing effect on these films has been tested.