The MoS2 nanobelts were successfully synthesized on SiO2/Si substrates using a vapor phase sulfurization process. Atomic force microscopy (AFM) techniques are employed to comprehensively study the morphology evolution of MoS2 from monodisperse nanoparticles to self-assembled nanobelts on the SiO2/Si substrates. A possible three-step morphology evolution process, which includes initial nucleation process, self -assembly process, and subsequent crystal growth process (Ostwald ripening), is proposed to explain the formation of MoS2. Moreover, MoS2 nanobelts are characterized by Raman spectroscopy and photo-luminescence (PL). These results provide the possibility to develop an easier-to-cooperate and morphology-controllable approach to fabricate novel architectures. (C) 2016 Elsevier B.V. All rights reserved.