Plasma polymer were deposited on polyethylene substrates using CHF₃(trifluoromethane) and CHF₃ plasma polymer deposited were again treated by plasma such as Ar, O₂, N₂. Characteristics of surface properties of CUF₃ plasma polymer treated were investigated by using static contact angle, AFM(atomic force microscopy), FT-IR, XPS (x-ray photoelectron spectroscopy), TA(thermal analyzer) and surface properties were varied with the different plasma process conditions.