A thin film of Ca(Ti, Fe)O-3, which is a mixed conductor of oxide ions and electrons, was prepared on various substrates by chemical vapour deposition using organocomplexes Ca(C11H19O2)(2), Ti(O-(C3H7)-C-i)(4) and Fe(C5H7O2)(3) as starting materials. These complexes were evaporated at temperatures of 250, 115 and 45 degrees C, respectively, and transported to the substrate surface at an almost steady state. Homogeneous films of single-phase Ca(Ti, Fe)O-3 were obtained at deposition temperatures of 750-800 degrees C under the total pressure of 30 torr for the reaction time of 60-90 min on silica glass substrate. The amount of Ca(Ti, Fe)(3) films formed and their microstructure were found to be greatly affected by the compositions and surface structures of substrate materials.