화학공학소재연구정보센터
Journal of Materials Science, Vol.31, No.10, 2693-2696, 1996
Determination of the Range of Lattice Distortion in AlN Sintered Body by Higher-Order Lane Zone Pattern
To analyse the magnitude and range of lattice distortion which is responsible for the low thermal conductivity in aluminium nitride (AIN) crystal grains, the higher order laue zone (HOLZ) pattern of transmission electron microscopy was used. The HOLZ patterns obtained from various positions in the AIN crystal grain show that the AIN crystal lattice is distorted in the vicinity of the grain-boundary phase, and the magnitude of lattice distortion becomes large as it approaches the grain-boundary phase. Also, the range of distortion extends to approximately 300 nm from the grain-boundary phase.