화학공학소재연구정보센터
Journal of Materials Science, Vol.31, No.24, 6495-6500, 1996
Variations in Microstructure and Composition of Indium Tin Oxide-Films with the Deposition Technique
Indium tin oxide (ITO) films have been deposited by reactive d.c.-sputtering and also by the reactive thermal evaporation technique onto glass substrates. The relationship between the microstructure and composition of the ITO films was found to strongly depend on the deposition technique. In addition the application of pure water vapour as the reactive sputtering atmosphere and its influence on the structural and compositional properties of the ITO films has been studied. X-ray diffraction investigations showed that all the films exhibited the bixbite structure of ln(2)O(3). No other crystalline phases were observed. Highly crystallized ITO films have been obtained using the reactive thermal evaporation technique. These films show a large average grain size of about 80 nm and a very homogeneous morphology. In contrast the d.c.-sputtered ITO films have a smaller average grain size and a characteristic texture. All deposited ITO films show an enlarged lattice constant compared to that of ln(2)O(3), A strong dependence of the chemical composition of the ITO films on the deposition technique and parameters was detected.