Single crystals of indium phosphide, oriented in the [001] direction and at the temperature of 400 degrees C, have been deformed by a Vickers indentor. The generation and the development of the dislocations was deduced from the topographical observations of the deformed samples. The dislocation distribution under the indented surface was explained taking into account the dislocation interactions. Finally, both aspects have allowed a greater understanding of material flow under the indentor to be presented.