Tritium permeation barrier (TPB) of Er2O3/SiC multilayer film was proposed to improve the tritium permeation resistance of 316L stainless steel. Surface and cross-section morphologies of film were observed by SEM and TEM, The Auger electron spectroscopy was used to investigate the depth profiles of Er, O, Si and C elements in Er2O3/SiC multilayer film. The chemical state of Er, O, Si and C elements were characterized by XPS. The deuterium permeation property is measured by using a quadruple mass spectrometer. The TEM cross-section microstructure and AES depth profiles shows that the multilayer film has alternative Er2O3 and SiC layers and form a modulation structure. The 0.3-mu m Er2O3/SiC multilayer film on 316L stainless steel reduces permeability by a factor up to almost 500, and higher PRFs can be obtained by optimizing the coating process. It is indicated that the Er2O3/SiC multilayer film shows the huge potential in improving the tritium permeation resistance. Copyright (C) 2015, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.