Journal of Adhesion Science and Technology, Vol.29, No.16, 1663-1679, 2015
Investigation of the adhesion of perforated MEMS clamped-clamped beams based on the GaAs MMIC process with the resonant method
This article presents a resonant method to identify the adhesion of the perforated clamped-clamped beams with different drying temperatures. The resonant method is utilized due to the non-destruction and good applicability for wide beams. In order to analyze the resonant frequencies of the perforated beams, an improved analytical model has been introduced to calculate the first and third resonant frequencies of the perforated beams, with a good agreement with the measured results. The validity of this resonant method is confirmed by the comparison of the beams' profiles measured by digital holographic microscopy. Furthermore, using this resonant method, the adhesion of a series of perforated gold beams is identified. These beams are fabricated based on the GaAs MMIC process, with different drying temperatures after releasing of the beams. The experimental results show that the success rate of the beams with the length of 215 mu m and the width of 45 mu m is 4/7 at the drying temperature of 20 degrees C, yet rises to 7/7 at the drying temperature of 100 degrees C. It means that higher temperature contributes to depressing the adhesion of the perforated beams, which is identical with the theory.