We report epitaxial growth, structural characterizations arid thickness dependent superconducting properties of LiTi2O4 films grown on (111) MgAl2O4 substrates by using pulsed laser deposition. The variations of growth temperature (T-g) and excess Li composition of target materials were found to be crucial for improving the crystallinity, as verified by X-ray diffraction rocking curve and the in-plane domain configuration. The crystallinity of the desired LiTi2O4 phase improved with increasing T-g, whereas the inclusion of Li-deficient phases became more significant due to high sublimation rate of Li species. The use of the excess Li targets allowed us to elevate T-g up to 750 degrees C (Li/Ti=1.0) with keeping high crystallinity and phase purity. For films grown under the best condition, the superconducting transition was observed near 12 K even when thickness was as thin as 9 nm. (C) 2015 Elsevier B.V. All rights reserved.