화학공학소재연구정보센터
Journal of Crystal Growth, Vol.438, 90-98, 2016
Numerical study of liquid phase diffusion growth of SiGe subjected to accelerated crucible rotation
The effect of accelerated crucible rotation technique (ACRT) on liquid phase diffusion (LPD) growth of SixGe1-x crystal has been investigated numerically. Transient, axisymmetric simulations have been carried out for triangular and trapezoidal ACRT cycles. Natural convection driven flow in the early growth hours is found to be modified by the ACRT induced Ekman flow. Results also reveal that a substantial mixing in the solution can be induced by the application of ACRT in the later hours of growth which is otherwise a diffusion dominated growth period for LPD growth technique. A comparison is drawn to the cases of stationary crucible and crucible rotating at a constant speed examined previously for this growth system by Sekhon and Dost (J. Cryst. Growth 430 (2015) 63). It is found that a superior interface flattening effect and radial compositional uniformity along the growth interface can be accomplished by employing ACRT at 12 rpm than that which could be achieved by using steady crucible rotation at 25 rpm, owing to the higher time averaged growth velocity achieved in the former case. Furthermore, minor differences are also predicted in the results obtained for trapezoidal and triangular ACRT cycles. (C) 2016 Elsevier B.V. All rights reserved.