화학공학소재연구정보센터
Journal of Materials Science, Vol.33, No.17, 4447-4453, 1998
Oxide and interface characteristics of oxidized silicon oxynitride ceramics - an investigation by electron microscopy
Hot-isostatically pressed silicon oxynitride (Si2N2O) ceramics free from sintering aids were oxidized in 1 atm dry oxygen at 1100 a nd 1300 degrees C. The structural a nd chem ica I characteristics of the oxide and the nature of the oxide-Si2N2O interface were determined using cross-sectional transmission electron microscopy in conjunction with small-probe energy dispersive X-ray ana lysis and selected-a rea electron diffraction. Oxidation of Si2N2O resulted in the formation of amorphous SiO2. The oxide-Si2N2O interface was chemically abrupt. The interface was very flat when parallel to low-index, high atomic density Si2N2O crystal planes but became notably undulated if oriented to high index, low atomic density planes. About 6 vol % residual SiO2 phase was present in the bulk of the Si2N2O ceramics. Current results have provided an important baseline for the understanding of the oxidation behaviour of Si2N2O