An inductively coupled thermal plasma process was used to produce nanosized Cu/SiC composite particles. The powders were characterized by means of chemical analysis, energy dispersive X-ray spectroscopy (EDX), transmission electron microscopy (TEM), specific surface measurements (BET), X-ray powder diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS). X-ray absorption fine structure analysis (EXAFS) was performed to determine the near range order structure of the nanosized particles.