Applied Chemistry, Vol.3, No.2, 76-79, October, 1999
휘발성유기화합물을 이용한 다이아몬드 필름증착
Deposition of diamond film using Volatile Organic Compounds
Diamond film was synthesized on molybdenum substrate by chemical reaction of volatile organic compounds and hydrogen gas using the plasma jet at atmospheric pressure. The morphology of film deposited is (111) faces at 1.5ml/min of toluene and (100) faces at 1.5mlmin of dichlorobenzene. The presence of non-diamond carbon phase has been detected at the temperature of 1050℃.