We developed a simple method to pattern self assembled monolayers of tetrazole triethoxylsilane with a variety of different molecules by photochemical microcontact printing. Under irradiation, tetrazoles form highly reactive nitrile imines, which react with alkenes, alkynes, and thiols. The covalent linkage to the surface could be unambiguously demonstrated by fluorescence microscopy, because the reaction product is fluorescent in contrast to tetrazole. The modified surfaces were further analyzed by X-ray photoelectron spectroscopy (XPS), time-of-flight secondary ion mass spectrometry (ToF-SIMS), atomic force microscopy (AFM), and contact angle goniometry. Protein-repellent micropatteins, a biotin-streptavidin array, and structured polymer brushes could be fabricated with this straightforward method for surface functionalization.