Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.13, No.2, 96-98, 1994 DOI10.1007/BF00416811 Export Citation Kinetics of the Formation of Cobalt Disilicide at High-Temperature Under Rapid Electron-Beam Heating Warris J, Suleman M, Mahmood F, Ahmed H Keywords:ALIGNED COSI2 INTERCONNECTION;TECHNOLOGY;SILICIDE;FILMS;CO;SI Please enable JavaScript to view the comments powered by Disqus.