Enhanced Disordering of GaAs/AlGaAs Multiple-Quantum-Well by Rapid Thermal Annealing Using Plasma-Enhanced Chemical-Vapor-Deposited Sin Capping Layer Grown at High RF Power Condition

Choi WJ; Lee JI; Han IK; Kang KN; Kim Y; Park HL; Cho K

Journal of Materials Science Letters, Vol.13, No.5, 326-328, 1994

DOI10.1007/BF00420787 Export Citation

Enhanced Disordering of GaAs/AlGaAs Multiple-Quantum-Well by Rapid Thermal Annealing Using Plasma-Enhanced Chemical-Vapor-Deposited Sin Capping Layer Grown at High RF Power Condition

Choi WJ, Lee JI, Han IK, Kang KN, Kim Y, Park HL, Cho K

Keywords:WAVE-GUIDES;LASERS;SUPERLATTICES;DIFFUSION