Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.13, No.16, 1192-1194, 1994 DOI10.1007/BF00241008 Export Citation Temperature-Dependence of Sputtering Yield of GaAs Under 30 keV Ar+ Bombardment Bhattacharyya SR, Ghose D, Basu D Keywords:GALLIUM-ARSENIDE Please enable JavaScript to view the comments powered by Disqus.