Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.13, No.16, 1204-1205, 1994 DOI10.1007/BF00241012 Export Citation Deposition of Niobium Silicide Thin-Films from Hexachlorodisilane and Niobium Pentachloride Cheng WS, Lee CY Please enable JavaScript to view the comments powered by Disqus.
