Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.13, No.24, 1793-1796, 1994 DOI10.1007/BF00776361 Export Citation Effects of Microwave-Power and Bias Voltage on Deposition of Amorphous Hydrogenated Carbon-Films Using Electron-Cyclotron-Resonance Plasma Chemical-Vapor-Deposition Maruyama K, Inoue T, Yamamoto M, Morinaga T, Saitoh H, Kamata K Keywords:DIAMONDLIKE CARBON;THIN-FILMS;RANGE Please enable JavaScript to view the comments powered by Disqus.
